microfocus GISAXS
Modern refractive x-ray optics combined with the high brilliance of Synchrotron sources allows to focus X-rays down to a beam diameter of a few µm. Using such a microfocus beam it is possible to conduct a local structural analysis on select local surface areas using grazing incidences scattering techniques (µ-GISAXS). We use the possibility to obtain local scattering information to investigate mesoscale structures such as microcantilever arrays. With the help of scanning µ-GISAXS experiments it was possible to investigate the structure and quality of the gold protection layer used for the synthesis of polymer brush coated microcantilever arrays as well as the structure of the polymer coating itself.